The recent development of the silicon technology effects the stream of the miniaturized mass spectrometry and its system. Trend of oil less also accelerated at the same time. Old oil pump and oil diffusion pump turned to dry pump and turbo molecular pump for example. In the program of Mars exploration and other space program, mass spectrometry is one of the useful techniques to analyze the chemical components of environments. In this paper the recent development of mini size mass spectrometry, which is handy type, and micro mass spectrometry is reviewed. The improvement toward compact size mass has been taken place in the every part of mass spectrometry system from soft ionization system, mass spectrometer to pumping system. Also this improvement wipes out contamination from the overflowed sample and oil system. As the result when higher sensitivity with less sample system overcomes the detection limit of dog nose, new era for mass spectrometer will be created as one of sensors, intelligent nose.