MATERIALS TRANSACTIONS
Online ISSN : 1347-5320
Print ISSN : 1345-9678
Energy-Filtered Image of Surface Blisters by Grazing Incidence Electron Microscopy
Sin IgarashiShunsuke MutoTetsuo TanabeTadashi Maruyama
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2001 Volume 42 Issue 10 Pages 2131-2132

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Abstract

We have examined fine structure of surface blisters formed by D+ or He+ irradiation onto mono-crystalline silicon by grazing incidence electron microscopy (GIEM), using an energy-filtering transmission electron microscope (EFTEM). Mapping of the projected thickness clearly visualized the structural difference of the blister skins formed by D+ and He+ irradiation respectively. A He distribution image of the He-blister was also successfully obtained.

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© 2001 The Japan Institute of Metals and Materials
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