Ion-Plating Deposition of MgO Thin Films

Kazuo Uetani; Hiroshi Kajiyama; Akira Kato; Akiko Takagi; Isao Tokomoto; Yasuhiro Koizumi; Koichi Nose; Yasushi Ihara; Ken-ichi Onisawa; Tetsuroh Minemura

doi:10.2320/matertrans.42.411

Kazuo Uetani, Hiroshi Kajiyama, Akira Kato, Akiko Takagi, Isao Tokomoto, Yasuhiro Koizumi, Koichi Nose, Yasushi Ihara, Ken-ichi Onisawa, Tetsuroh Minemura

著者情報

キーワード: plasma display panel, magnesium oxide, protective layer, advanced ion-plating

ジャーナルフリー

2001 年 42 巻 3 号 p. 411-413

DOI https://doi.org/10.2320/matertrans.42.411

詳細

抄録

We developed an advanced ion-plating (AIP) method and deposited MgO thin films for protective layer in plasma display panel (PDP) with it. The preferred orientation of the films was dependent on deposition conditions; oxygen content and substrate temperature. The film was mainly (111) oriented with a small amount of randomly oriented textures. Fine columnar structures grew vertically from the substrate interface with sharp apexes at the film surface. It was supposed that the film structure could be improved a great deal for PDP applications by our AIP.

責任著者(Corresponding author)

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