2005 Volume 46 Issue 11 Pages 2536-2540
This study investigates the characteristics of IMI (ITO–Metal–ITO) transparent conductive thin films, with an Ag–Ti alloy intermediate layer. Multi-layers were deposited by sputtering. ITO–AgTi–ITO films have better transmittance than ITO–Ag–ITO films in the visible wavelength range. The maximum transparency is 94% after being annealed at 573 K in a vacuum. Although the resistivity of ITO–AgTi–ITO films is slightly higher than that of ITO–Ag–ITO films, the former apparently exhibit greater thermal stability and durability. After exposure to the environment at 323 K with a relative humidity of 90% for 144 h, corrosive spots appear on ITO–Ag–ITO films but not on ITO–AgTi–ITO films.
