2007 Volume 48 Issue 7 Pages 1919-1923
BaRuO3 (BRO) thin films were prepared on SrTiO3 (STO) single crystal substrate by laser ablation, and their microstructures and the anisotropy of electrical conductivity were investigated. The (205) and (104) doubly oriented BRO thin film was grown epitaxially on (001) STO substrate. Epitaxial (110) and (009) BRO thin films were obtained on (110) and (111) STO substrates, respectively, at oxygen pressure of 13 Pa and substrate temperature of 973 K. Epitaxial (205) (104) BRO thin film had a tetragonal texture whereas (110) BRO thin film showed a faceted island texture. Epitaxial (009) BRO thin films had a smooth surface due to a good lattice consistency between (009) BRO plane and (111) STO plane, and exhibited the highest electrical conductivity of 1.1×105 S·m−1 among the (205) (104), (110) and (009) BRO thin films.