MATERIALS TRANSACTIONS
Online ISSN : 1347-5320
Print ISSN : 1345-9678
Structure and Non-Equilibrium Phase Diagram of the Co-Sputtered and Post-Annealed Fe-ZnO System
Jun-ichi EchigoyaAkira TakanoMasayoshi YamaguchiKatsuhiko NonakaMasahiko Nishijima
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2009 Volume 50 Issue 5 Pages 1208-1213

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Abstract

X-ray diffraction and electron microscopic studies on co-sputtered Zn1−xFexO single crystalline films showed the solubility limit to be about x=0.50 at 673 K. An increase of Fe greater than 0.50 resulted in the existence of Fe metal and (ZnFe)Fe2O4 spinel solid solution in a matrix of (ZnFe)O wurtzite solid solution below a substrate temperature of 573 K. Above a substrate temperature of 673 K, a ZnFe2O4 spinel phase rather than a Fe metal phase was seen. Annealing of as-sputtered films with a single phase of Zn1−xFexO in air led to decomposition to the two-phase structure of Zn1−xFexO wurtzite and ZnFe2O4 spinel and the decrease of the solubility limit of Fe in ZnO to about x=0.11 at 873 K.

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© 2009 The Japan Institute of Metals and Materials
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