Photo-Catalytic Activity of Different Thicknesses TiO₂/SnO₂ Double Layer Nano Composite Thin Films

Abstract

TiO₂ thin films were deposited on rutile SnO₂ films by reactive radio frequency magnetron sputtering. The effect of thickness of TiO₂ layer, on the microstructure and chemical states of the TiO₂/SnO₂ thin films, was investigated in detail. With the increase of TiO₂ film thickness deposited on SnO₂ film, the crystallization of TiO₂ film becomes more perfect, and more Ti atoms are bonding in forms of stoichiometric TiO₂. There is a thickness of TiO₂ film (150 nm) deposited on SnO₂ substrate that yields the best photo-induced superhydrophilicity and surface wettability.