2014 Volume 55 Issue 3 Pages 410-412
The ion implantation is a powerful scientific and technological tool in material research. Multiple ion beam facilities have been used to simulate the irradiation effects of neutrons on relevant nuclear materials over 30 years. By the use of transmission electron microscope (TEM) link facility, the microstructure evolvement in material can be in-situ studied during the irradiation and following annealing processes. In this paper, a triple beam in-situ facility, composed of a 400 kV heavy ion implanter, a 50 kV hydrogen–helium coaxial ion implanter and a 300 kV electron microscope, will be presented. This facility will also be the first in-situ facility with the capacity of delivering the triple ion beam including hydrogen, helium and heavy ion beam to the specimen in TEM simultaneously. The angle between the two beam lines and microscope axis is 30°, respectively.