MATERIALS TRANSACTIONS
Online ISSN : 1347-5320
Print ISSN : 1345-9678
ISSN-L : 1345-9678
Fabrication of Nano-Crystalline Diamond Duplex Micro-Gear by Hot Filament Chemical Vapor Deposition
Hong-jun WangDun-wen ZuoFeng XuWen-zhuang Lu
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2017 Volume 58 Issue 1 Pages 91-94

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Abstract

Chemical vapor deposition (CVD) diamond micro-components are attracting considerable interest due to their exceptional properties and potential applications. Micro-gears are an important actuating component in micro-machines or micro-electromechanical systems. In this study, nano-crystalline diamond duplex micro-gears for micro-machine applications have been fabricated by combining hot filament CVD (HFCVD) with inductively coupled plasma etching. Based on scanning electron microscopy, X-ray diffraction, and micro-Raman spectroscopy observations, the nano-crystalline diamond duplex micro-gears produced by HFCVD are found to be faithful replicas of microstructure silicon molds produced by time-multiplexed deep etching. The fabricated duplex micro-gear consists of two gears. A gear with 14 teeth constitutes the top layer and has root and tip diameters of 1.14 mm and 1.52 mm, respectively, while the second 20-tooth gear constitutes the bottom layer and has root and tip diameters of 1.75 mm and 2.20 mm, respectively. The total thickness of the micro-gear is about 20 μm.

Fig. 3 SEM images of duplex micro-gear produced by HFCVD: (a) morphology of duplex micro-gear; (b) enlarged SEM image of duplex micro-gear. (c) high-resolution SEM image of duplex micro-gear. (d) cross-sectional image of single tooth. Fullsize Image
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© 2016 The Japan Institute of Metals and Materials
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