Raman Spectroscopy through the Indenter Working as an Optical Objective

Abstract

The transparent indenter which can used as an optical objective were tested to obtained a spectra during the indentation. A special device which comprises the transparent indenter and actuator was developed and embedded into the Raman spectrometer. An indentation into the silicon sample was performed and phases that exist under the load and without it were identified.

Fig. 4 Raman spectra obtain during and after the unloading part of the indentation.