MEMBRANE
Online ISSN : 1884-6440
Print ISSN : 0385-1036
ISSN-L : 0385-1036
Color-Imaging Ellipsometer : High-Speed Measurement Apparatus of In-Plane Distribution of Thin Film
Daisuke Tanooka
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2003 Volume 28 Issue 3 Pages 155-158

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Abstract

We have developed Color-Imaging Elliposmeter for measuring in-plane distribution of thin film. Unlike the conventional ellipsometer, this apparatus can measure large area of thin film at high speed. The features of this apparatus are using the incident light with the large diameter for measuring wide area, a 2-dimensional CCD camera, and three wavelengths simultaneously. As an example, we introduce the example of measurement of thickness distribution of SiO2 film on Si substrate and the optical anisotropy of polyimide film with molecular orientation.

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