Journal of the Magnetics Society of Japan
Online ISSN : 1882-2932
Print ISSN : 1882-2924
薄膜・微粒子・多層膜・人工格子
六角形ガイド内に配列した強磁性体ドットのサイズばらつき
木村 香里櫻井 正敏柏木 一仁鎌田 芳幸喜々津 哲内藤 勝之
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ジャーナル オープンアクセス

32 巻 (2008) 3 号 p. 312-316

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Patterned magnetic dots were fabricated by an Artificially Assisted Self-Assembling (AASA) method, and the dot size dispersion was estimated. In AASA method, self-assembled polymer dots are formed in a groove guide and are used for the etching mask. It is found that the dispersion of the size of the magnetic dots (average diameter: 23nm, average pitch: 45nm) can be reduced by optimizing the guide shape. Decreasing the molecular weight of the polymer is also found to be effective to reduce the dot size dispersion. Dispersion of 10.6 % was achieved using a hexagonal guide. This feature is advantageous to the patterned magnetic recording media compare to the electron beam lithography, where the dispersion is increased with the patterning size.

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© 2008 (社)日本磁気学会
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