2009 年 33 巻 3 号 p. 252-255
Recently, the composite films of ceramics and metals are useful for electric devices. In this study, Y2O3 single layer films and Fe / Y2O3 layered films were fabricated by aerosol deposition (AD) method. The saturation magnetic polarizations Js of Fe / Y2O3 AD films were 0.7 ∼ 1.1 T. The real part of relative permeability μr' increased from 4.5 to 5.6 and the resonant frequency fr decreased from 700 to 320 MHz after the heat treatment at 973 K for 1h. These changes were considered to be due to the decreases of coercivity Hcj from 8.7 kA·m-1 to 7.5 kA·m-1.