2018 年 2 巻 2 号 p. 48-51
D022-Mn2.6Ga thin films were fabricated by an ultra-high vacuum electron beam vapor deposition system on a MgO (100) single crystalline substrate with different buffer layer thicknesses (0.7 - 5 nm). As the annealing temperature Ta increased to 400℃, the squareness of the M-H curves improved, and the saturation magnetization Ms and magnetic anisotropy Ku increased. At that time, from XRD patterns, D022-Mn3Ga (002) superlattice and (004) fundamental peaks were clearly observed from all samples. Our results suggest the existence of a magnetic dead layer of about 3.5 nm in the MnGa layer. Because of this magnetic dead layer, a relatively high Ku of 9.3 Merg/cm3 and low surface roughness Ra of 0.93 nm were obtained from Mn2.6Ga thin film on a 2-nm Fe buffer at Ta = 400℃. The results in this work suggest that Fe is a suitable buffer layer for perpendicular magnetized D022-MnGa thin film.