ITE Transactions on Media Technology and Applications
Online ISSN : 2186-7364
ISSN-L : 2186-7364
Special Section on Advanced Image Sensor Technology
[Paper] Demonstrations of Polarization Imaging Capability and Novel Functionality of Polarization-Analyzing CMOS Image Sensor with 65 nm Standard CMOS Process
Takashi TokudaKiyotaka SasagawaNorimitsu WakamaToshihiko NodaKiyomi KakiuchiJun Ohta
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2014 Volume 2 Issue 2 Pages 131-138

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Abstract

A polarization-analyzing CMOS image sensor with 65 nm standard fabrication process was designed and characterized. Polarization-analyzing image sensor pixel was realized using wire grid structures designed with a metal wiring layer within the standard CMOS process. Taking advantage of sub-100 nm CMOS process, a fine grid pitch was realized. Polarization-analyzing performance significantly higher than our previous sensors with 0.35 μm CMOS process was obtained. Polarization imaging capability was demonstrated for a scene with local polarization variation. With an aim of further performance improvement, subtraction readout scheme and multiple layer stacked on-pixel polarizer were proposed and discussed.

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© 2014 The Institute of Image Information and Television Engineers
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