Abstract
Industrial clean rooms have become indispensable equipments for various kinds of industries recently. Most typical ones are those used in the production lines of semiconductors. The air flow in a clean room is very complex. It consists of various types of recirculating flow and the direction of mean air flow is changed locally. In order to keep the air to be clean in a clean room, it is necessary to control the movement of dispersed particles effectively. Therefore the design of air velocity distribution is most important for cleanness control because the movement of particles may be assumed to be passive. In this report, the characteristics of air flow in various types of clean rooms are analysed by the methods of numerical simulation, measurement and visualization. The diffusion of airborne particles are also described.
