抄録
A specific freon (chlorofluorocarbon) was converted to a solid state substance. Experiments were performed by means of copolymerization from trichlorotrifluoroethane (CFC113) and ethylene mixtures by cold plasma. The copolymer films have a yellow brown color and a smooth surface. Maximum deposition rate of films from CFC113 and ethylene mixtures is 38 times as large as that from ethylene itself. The results of XPS and IR measurements show the existence of C-Cl and C-F bonds in copolymer films. Measurement of electric resistance shows that the electric resistivity of the copolymer films is higher than 5×106Ω⋅cm.
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