コロナ式放電イオナイザに関する基礎研究

抄録

A corona discharging type ionizer is used generally and widely as countermeasure against ESD (Electric Static Discharge) in the semiconductor production line and so on. In this study two types of corona discharging ionizer (one is DC power supply type and the other is piezoelectric one) were tested to search better practical use condition. In the piezoelectric type ionizer, it was confirmed that there seemed to be an optimum value because it showed an excellent result according to the parameter, for example high gate frequency and etc. It is necessary to measure the ion current in each method to explain the former reason. Measuring the ion current of DC power supply type ionizer is easy, however, measuring the ion current of piezoelectric type one is difficult because it contains the capacitive current. Up to now, the bridge circuit to compensate for the capacitive current is made and has been improved. As a result, it became possible to observe the ion current on a minus side. In the future, an improved the circuit can be expected to observe the ion current on a plus side. If the observing method can be established, the mechanism of corona discharging type ionizer is figured out.