Real-Time Surface Shape Measurement by an Active Interferometer

抄録

We have succeeded in video rate analysis of fringes stabilized by an active interferometer placed outside optical benches. The interferometer uses the closed loop control of injection current of a laser diode to compensate for fringe movement that is detected by a spatial filtering detector. A video image of the locked fringes with tilt is supplied to the real-time fringe analyzer that delivers unwrapped phase distribution from the three phase shifted fringes generated by the electronic moiré method. For a concave mirror of 130 mm diameter placed on a wooden desk we observed the repeatability of λ/60 for P-V surface error of λ/5.