Advanced diagnostics of industrial plasmas using laser Thomson scattering

Abstract

The laser Thomson scattering (LTS) technique is well known as a powerful diagnostic tool to reveal the spatial distributions and temporal evolutions of electron density (ne) and electron temperature (Te) of various types of plasmas. Recently, we have applied LTS to laser-produced tin plasmas for High-power EUV light sources. Using a special hand-made spectrometer with 6 gratings, the ion component of the Thomson scattering from the EUV light source plasmas was detected for the first time. The obtained 2D-profiles of ne and Te enabled direct comparisons between the plasma parameters and EUV emissivity. These experimental results clearly show that LTS measurements are a powerful tool to diagnose industrial plasmas.