Development of a TOF-ERDA measurement system for depth profiling of light elements and its application

Abstract

Time-of-Flight Elastic Recoil Detection Analysis (TOF-ERDA) is an analytical method using ion beams. Ion beams irradiate the sample from MeV to tens of MeV, and the energy and the time-of-flight of the recoil ions are detected simultaneously. A wide range of elements, from light elements to heavy elements, can be analyzed with excellent depth resolution, and it is particularly useful for analyzing light elements in thin films. In this paper, we describe the TOF-ERDA system developed by the authors and the results of performance tests. We also present an example of evaluating lithium-ion battery electrodes, and titanium oxide thin films.