Utilization of machine learning in the semiconductor manufacturing process

Abstract

Many semiconductors are used for control and communication in electronic devices that are indispensable to our lives. There is a huge number of products that use semiconductors, such as automobiles and smartphones. Semiconductor devices, which are the core of these electronic devices, are manufactured by performing various microfabrications on silicon substrates. Nanometer-order processing accuracy is required for semiconductor device manufacturing, and processes such as etching, film formation, and cleaning are performed using chemicals and plasma. With semiconductor manufacturing equipment, the plasma process is controlled using various adjustment parameters. Regression algorithms using machine learning are being applied to search for new materials and manufacturing processes.