蒸着金膜の電子顕微鏡及び電子廻析による研究
1956 年 25 巻 7 号 p. 294-299
詳細
1956 年 25 巻 7 号 p. 294-299
Structure of evaporated gold films of thicknesses from 5 to 2350A are investigated by electron microscope and diffraction method. Evaporation conditions, such as pressures of argon atmosphere, temperatures of substrates at evaporation and substrates materials, and also the annealing conditions after evaporation are widely varied.
Above a certain critical pressure of argon atmosphere, gold blacks are found to be pro-duced due to collision with argon atoms near the evaporation source, not due to impurity.
Particles aggregate in relatively large crystals, and gold particles change their shape above the temperature of recrystallization.
Fibre structure of the films under various conditions are also studied, and the origin of electric resistivity of the black films are considered.
