超高真空で蒸着されたチタン薄膜の構造
1964 年 33 巻 8 号 p. 559-564
詳細
1964 年 33 巻 8 号 p. 559-564
The evaporation process of titanium in a U. H. V. system (10-9 Torr) is investigated in details. Electron diffraction and electron microscopic studies are made on the structure and epitaxial growth of titanium films deposited on heated cleaved faces of rock salt and mica. The epitaxial relations (0001)Ti_??_(001)NaCI and (3034)Ti_??_(001)NaCI are observed on the films evaporated in U. H. V. The titanium films evaporated in high vacuum (10-5 Torr) changed to titanium carbide in a few minutes.
