RFイオン源
1969 年 38 巻 12 号 p. 1114-1120
詳細
1969 年 38 巻 12 号 p. 1114-1120
The constraction of RF ion source is described and its working principles are descussed. Recent data from literature on mechanism of the ion beam extraction, beam energy distribu-tion and beam composition are reported as a systematic survey.
