応用物理
Online ISSN : 2188-2290
Print ISSN : 0369-8009
ISSN-L : 0369-8009
偏向電極を備えた新しい電子線蒸着用電子銃
田村 一二三森 金太郎
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ジャーナル フリー

1969 年 38 巻 6 号 p. 574-579

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It is often observed in the case of conventional evaporators with electron-bombardment heating that scattered electrons onto the surface of a deposit film cause twig-like cracks and minute structural irregularities.
In order to prevent such charge accumulation on the film surface, the present authors have developed an evaporator of a new type which includes a Pierce gun with an electrostatic deflector. When the cathode is grounded and positive high voltage is supplied to both the anode and the crucible, uniform films can be obtained even on a glass substrate. In this case the thickness is easily monitored through measuring the ion current into detectors near the substrate.

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