EPMAによる多元系試料の定量補正法

抄録

For a reliable quantitative electron probe microanalysis it is absolutely necessary to make some correction calculations, namely, correction for absorption, atomic number and fluorescence. However the correction calculation procedure for a given material, especially a multi-component system is so complicated that it requires much laborious work.
This paper presents a method for approximate calculation of each element in multi-com-ponent systems from the measured intensities of their characteristic X-ray radiations.
The results clearly show that the proposed method is very useful for obtaining a quick and accurate determination of the constituent elements in the multi-component systems.