1975 年 44 巻 5 号 p. 474-482
Transparent conducting films such as SnO2 are usually fabricated by thermal decomposition of SnCl4. In this case, HCl gas is ordinarily produced and gives rise to some trouble in the manufacturing process. In order to avoid HCl gas in the fabricating process of transparent conducting films, the authors have studied the thermal decomposition of tetraalkyltin, and obtained results in which our expectations are fully realized. These films were deposited on pyrex glass, and their physical and electrical properties were investigated.
From the study of X-ray diffraction patterns and electron diffraction patterns, it was found that films produced at a comparatively low temperature consist of SnO and SnO2 and films produced at a higher temperature consist of SnO2. Depending on the characteristics of the SnO2 film, electrical properties are almost equal to or higher than those of films obtained by decomposition of SnCl4. Moreover our method are superior to the ordinary method from the point of view of manufacturing process.