Semiconductor detectors are becoming essential in recent accelerator experiments with an ability of very precise position resolution. At recent high energy and luminosity experiments, high radiation tolerance is required. We have developed silicon detectors as an inner tracking detector for the LHC-ATLAS experiment with performing radiation tolerance studies using 70 MeV proton beam at the Cyclotron and Radioisotope Center (CYRIC), Tohoku University. In this article, the method of irradiation and evaluations of our developed detectors are presented.
