Annual Meeting of The Ceramic Society of Japan, 2005
Session ID : 1E19
Conference information
Host: The Ceramic Society of Japan
Defect formation induced by ion implantation in ZnO thin film
*Isao Sakaguchi, Syunichi Hishita, Haruki Ryoken, Yoshiyuki Sato, Naoki Ohashi, Noriko Saito, Hajime Haneda
Author information
Keywords:
Ion implantation,
zinc oxide
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