Abstract
The reflection (r) intensity measurement with non-contact probe was carried out for measuring the ferroelectric and dielectric distribution in the dielectric materials. In order to obtain the microscopic dielectric distribution, analysis and adjustment of spatial resolution were carried out. The r intensity was measured as a function of distance between sample and probe. The sample was selected for BaTiO3 and MLCC. In analysis, the spatial resolution was calculated using Bethe's theory based on Kirchihoff's diffraction theory. From r intensity mapping measured with probe, dielectric permittivity distribution was investigated, and experimental spatial resolution was tried to estimated and compared with theoretical calculation.
