Plasma and Fusion Research
Online ISSN : 1880-6821
ISSN-L : 1880-6821
Regular Articles
Spatial Uniformity Evaluation of Atmospheric-Pressure Microwave Line Plasma for Wide-Area Surface Treatment
Haruka SUZUKIHirotsugu KOMATomohiro OGASAWARAYosuke KOIKEHirotaka Toyoda
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2021 Volume 16 Pages 1406046


Spatial uniformity of an atmospheric-pressure microwave line plasma is evaluated from surface hydrophilicity treatment of polyethylene terephthalate film as well as observation of optical emission from the plasma. Prior to the experiments, the structure of the waveguide-based plasma source is optimized using a three-dimensional electromagnetic simulation to suppress standing-wave generation for the uniformity of plasma production. The spatial distribution in the longitudinal direction of the Argon (Ar) plasma is investigated by operating the microscope parallel to the slot and by irradiating film with the plasma to improve surface wettability of the film. Uniform profile of water contact angle is obtained in 40cm with very high-speed processing.

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© 2021 by The Japan Society of Plasma Science and Nuclear Fusion Research
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