Journal of Photopolymer Science and Technology
Online ISSN : 1349-6336
Print ISSN : 0914-9244
ISSN-L : 0914-9244
Plasma Parameters in Platinum Film Formation on the Various Materials by Plasma
Masaaki Katoh, Yusuke Igarashi, Akira Kojima, Takeo Ohte
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Keywords: plasma, sputter deposition, fuel cell, catalyst, platinum
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2003 Volume 16 Issue 1 Pages 37-38

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© 2003 The Society of Photopolymer Science and Technology (SPST)
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