In order to prepare hydrophobic and hydrophilic surfaces, silane coupling treatment with hexamethyldisilazane (HMDS) and exposing to oxygen plasma are carried out to silicon oxide substrates, respectively. Surface force measurement indicates that the attractive force F of the AFM tip is more sensitive to surface energy variation of the solid surface. The adhesion work W mainly depends on polar component of surface energy. Positive correlation between elastic energy Ee of the cantilever tip and adhesion work W can be confirmed. By using two kinds of tips which have different component values of surface energy, surface property in lithography process can be analyzed.
2003 The Society of Photopolymer Science and Technology (SPST)