抄録
Reproducing process of nano structures is newly proposed by the nano casting method. The replicated mold is fabricated using UV curable resin from the master structure by the nano casting method. Using the replicated mold, fine structures are again transferred to the polymer by the nano casting method. The damages to the original structures are relaxed in the replication process and the replicated mold is utilized repeatedly. Fine pattern reproduction using PMMA is successfully demonstrated from the quartz original anti-reflective structure. However, the problem is the releasing process from the replicated polymer mold.
