Development and Evaluation of a Binary Grating consisting of Multi-layer Diffraction

Abstract

The binary hologram masters with multi-layer refractive index were developed and evaluated in their characteristics. The chirped diffraction grating was fabricating by electron-beam lithography. The design of metallic binary multi-layer gratings were successfully fabricated by excellent polarization separation elements (Hologram Color Filter). The obtained gratings designed were formed by binary metallic microstructures and deflected the incoming light into a certain direction with theoretical efficiency of over 90%.