Decomposition Process of PMMA-based Polymer Using Atomic Hydrogen Generated by a Tungsten Hot-Wire Catalyst

Seiji Takagi; Takashi Nishiyama; Masashi Yamamoto; Eriko Sato; Tomosumi Kamimura; Toshiyuki Ogata; Hideo Horibe

doi:10.2494/photopolymer.29.629

Seiji Takagi, Takashi Nishiyama, Masashi Yamamoto, Eriko Sato, Tomosumi Kamimura, Toshiyuki Ogata, Hideo Horibe

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Keywords: Atomic hydrogen, Hot-wire catalyst, Poly(methyl methacrylate), Surface structure, Micro structure

JOURNAL FREE ACCESS

2016 Volume 29 Issue 4 Pages 629-631

DOI https://doi.org/10.2494/photopolymer.29.629

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Abstract

We investigated the formation of microstructure on the surface of Poly(methyl methacrylate) - based polymer (PMMA - based polymer), which is a polymer for the ArF photoresist, in decomposition process by using atomic hydrogen generated by a tungsten hot-wire catalyst.

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