2016 Volume 29 Issue 5 Pages 671-674
Arkema has developed two complementary strategies to enable early introduction of DSA technology into lithographic large nodes. The blend approach is a very powerful way to easily tune the reachable period. Special BCPs and blends enable to increase achievable BCP film thicknesses and to limit the defectivity leading to improved self-assembly's properties. Special BCPs specially prove dramatic improvement in the self-assembled features as regards to classical PS-b-PMMA systems of same dimension. Additionally, the processes for both of these systems are compatible with current end users' requirements.