Abstract
The properties of the template material are important for structure replication during nanoimprint lithography. Soft templates used in soft lithography often deform under the pressure applied in the imprint process. This deformation influences the polymer filling effect. A good understanding of the deformation of soft templates and the filling of the polymer is necessary for accurate replication of the micro structure. In this study, the polymer filling, template stress distribution, and template deformation during the nanoimprint lithography process were simulated. The effect of polymer filling is described in terms of the maximum and minimum polymer filling heights. Increasing the template elastic modulus decreases the template deformation. The polymer filling height increases continuously with increasing template elastic modulus. The stress concentration and maximum stress increase with the template elastic modulus. The influence of template deformation on the polymer filling effect is also discussed.
