Journal of Photopolymer Science and Technology
Online ISSN : 1349-6336
Print ISSN : 0914-9244
ISSN-L : 0914-9244
Three-dimensional Numerical Simulation of Liquid Film Formation and the Distribution of Cleaning Solutions on a Rotating Disk
Yoshinori Jinbo Yuki MizushimaToshiyuki Sanada
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2022 Volume 35 Issue 4 Pages 359-364


In a single wafer processing, it is crucial to predict and control liquid film flow flowing over the rotating disk and the chemical solution concentration distribution to achieve efficient cleaning. This study numerically obtained the distribution of liquid film and cleaning solution concentration on a rotating disk using the open-source program, OpenFOAM. We prevented numerical diffusion from liquid to gas by incorporating a conservative scheme into the mass transport equation. The obtained liquid film distribution and surface etching amount agreed with the literature.

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© 2022 The Society of Photopolymer Science and Technology (SPST)
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