Journal of Photopolymer Science and Technology
Online ISSN : 1349-6336
Print ISSN : 0914-9244
Chemically Amplified Main Chain Scission: New Concept to Reduce Line Edge Roughness and Outgassing
Christian Eschbaumer, Nicole Heusinger, Christoph Hohle, Michael Sebald
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Keywords: Line Edge Roughness, Outgassing, Main Chain Scission, Polycarbonate
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Volume 15 (2002) Issue 4 Pages 673-676

DOI https://doi.org/10.2494/photopolymer.15.673
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© The Technical Association of Photopolymers, Japan
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