SYNTHESIS OF THIN LAYER OF FLUORINATED POLYMER BY LASER CVD-DIRECT SYNTHESIS OF PERFLUOROPOLYETHER THIN FILM ON SURFACE BY OXIDATIVE POLYMERIZATION OF A ERFLUOROPROPENE-OXYGEN MIXTURE USING AN ArF EXCIMER LASER

Abstract

Thin film of fluorinated polymer (perfluoropolyether) was synthesized directly on surface of several substrates by laser-induced chemical vapor deposition (CVD) technique. A hexafluoropropene-oxygen mixture was used as a starting material. The reaction proceeded through oxidative polymerization of the mixture induced by UV-irradiation using an ArF excimer laser at 193nm The mechanism of the oxidative polymerization of hexafluoropropene was discussed in terms of free radical initiators formed in the photoreaction.