Volume 8 (1995) Issue 1 Pages 29-36
The spectral sensitivity of Water-soluble Azide-Polymer [PVA-AzBA(Na)] prepared by the acetalization of poly(vinyl alcohol) (PVA) with sodium p-azidobenzaldehyde-o-sulfonate[AzBA(Na)] has been extended to the light of longer wavelength than 300nm by the addition of several water soluble cationic dyes. Thioxanthon derivative(QTX) was one of the most useful sensitizers among the investigated dyes. The systems are water based photoresist and are able to develop by water. PVA-AzBA(Na)-SBQ polymer was also prepared by acetalization of PVA-AzBA(Na) with 4-formyl styrylpyridinium methosulfate (SBQ) which acted as polymer-sensitizer and photoreactive group. PVA-AzBA(Na)-SBQ/QTX system shows high sensitivity and exhibits good resolution by contact or proximity exposure.