Proceedings of JSPE Semestrial Meeting
2002 JSPE Autumn Meeting
Session ID : H05
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Host: The Japan Society for Precision Engineering

Fabrication of Nano-structure Single Crystal Diamond
*Yutaka Ando, Yoshiki Nishibayashi, Kouji Kobashi, Takashi Hirao, Kenjiro Oura
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Keywords: reactive ion etching, microwave plasma etching, single crystal diamond, nano-fabrication, microfabrication
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[in Japanese]
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© 2002 The Japan Society for Precision Engineering
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