Abstract
In these years, we have been developing the versatile micro robot system in order to realize a miniature size production system such as the desktop micro robot factory. The constant speed positioning is very important to reduce oscillation of the micro tools. However, the micro robot could not position the micro tools with constant speed, because the robot moves by inch–worm manner. In this paper, we describe the special mechanism which could reduce the oscillation of micro tools mounted on the robot. The unique structure, precise control principle and experimental results are also describes for more precise micro processing organized by versatile micro robots.
