Proceedings of JSPE Semestrial Meeting
2007 JSPE Autumn Conference
Session ID : B40
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Evaluation of Measurement Accuracy in Aspherical Measurement by Multi Zone Interfere Scanning
*Hirofumi Suzuki, Takahiko Kinoshita, Atsushi Satoh, Hideyuki Matsumoto
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Keywords: Ultra Precision Aspherical Form, None Contact Measurement, Multi Zone Interfere Scanning
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[in Japanese]
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© 2007 The Japan Society for Precision Engineering
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