Proceedings of JSPE Semestrial Meeting
2008 JSPE Spring Conference
Session ID : C22
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Host: The Japan Society for Precision Engineering

Influence of the hydroxyl radical in single-crystal SiC polishing
*Makoto Sato, Hiroshi Ebisu, Toru Nonami
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Keywords: silicon carbide, polishing, hydroxyl radical, photocatalyst, oxidizing agent, electron spin resonance
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[in Japanese]
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© 2008 The Japan Society for Precision Engineering
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