Proceedings of JSPE Semestrial Meeting
2011 JSPE Autumn Conference
Session ID : F46
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Host: The Japan Society for Precision Engineering

Polishing Mechanism on Oxide Optical Crystal CMP
*Shinji Koga, Toshiro Doi, Syuhei Kurokawa, Osamu Ohnishi, Michio Uneda, Yoji Matsukawa, Hagchang Lee, Keiji Matsuhiro
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Keywords: Lithium Niobate, Lithium Tantalate, CMP, Chemical Mechanical Polishing
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[in Japanese]
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© 2011 The Japan Society for Precision Engineering
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