Proceedings of JSPE Semestrial Meeting
2011 JSPE Autumn Conference
Session ID : L34
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Host: The Japan Society for Precision Engineering

Development of a Small-Sized Hydrostatic Spindle using Magnetic Ionic liquid for a High Vacuum Chamber
*Kazuki Kurashige, Shigeka Yoshimoto, Kei Somaya
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Keywords: Static Bearing, Spindle, Ionic Liquid, Vacuum
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[in Japanese]
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© 2011 The Japan Society for Precision Engineering
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