Abstract
GF(Gaussian filter) to extract the roughness profile from a primary profile suffers strongly from the outliers mingled in the data. To solve this problem, several schemes of robust GF have been proposed. However there are several fatal problems that a mean line determined with respect to the measurement data containing no outliers is not coincident with the mean line of the GF output. To solve this problem, we have been proposed the FMGF(Fast M-Estimation based Gaussian Filter). This proposed method could provide completely the same results of the original GF method. However, it is not confirmed whether a transmission characteristic of this method is corresponding to the transmission characteristic of the GF. Therefore, this method cannot be applied to the real applications for the measurement of roughness profile where the transmission characteristic of GF is strictly treated. In this paper, we confirm that the transmission characteristic of this method is corresponding to the transmission characteristic of the GF.
